21333 - Flame Detection For Silane and Other Pyrophoric Non-Hydrocarbon Fires [ ]

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From: NFPA 2013 Conference & Expo

21333 - Flame Detection For Silane and Other Pyrophoric Non-Hydrocarbon Fires

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Presenter: Ernesto Vega Janica and Jonathan Eisenberg

Our research is based on technical provisions of NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities, and ANSI/CGA standards as approved methods for the protection of semiconductor fabrication facilities for bulk silane storage and handling. In this session, a real case scenario is examined under Code regulations and possible detection system layouts are analyzed. Our lessons learned are also discussed.